SPEEDFAM-LAPMASTER DSM 9B
The DSM 9B double-side processing system is a high-precision solution for finish or semi-finish machining, capable of simultaneously lapping, fine grinding, diamond polishing, or soft polishing both sides of workpieces. With versatile applicability, the DSM 9B meets the demands of traditional metal processing and is also suitable for processing thin, brittle, semiconductor, and optical materials.
The processing principle of the DSM involves positioning the workpiece between two rotating upper and lower plates. For soft polishing applications, a special polishing pad is attached to the polishing plate surface to achieve the required roughness.
The key to the processing quality, speed, and versatility of SPEEDFAM-LAPMASTER double-side equipment lies in the 4-way motion principle.
This 4-way motion reduces processing time and significantly outperforms the 2-way and 3-way performance of other double-side equipment.
How 4-way motion is achieved: Workpieces are clamped in fixtures to enable 4-way motion, including:
Rotational speed and direction of the upper and lower plates relative to the fixtures (1 and 2);
Rotational/planetary motion of the fixtures relative to the rotational speed and direction of the upper and lower plates – the fixtures always rotate in the same direction as the lower plate (3);
Axial motion of the fixtures relative to the rotational speed and direction of the upper and lower plates (4);

Hardware
4-Way movement
Active control system for the flatness of the disc surface
Speed control
Multi-motor control (up to 4 motors)
Pressure control system
Gear-shaped fixture
Automatic thickness control

Software
Arm-operated touch screen control system
Security login level
Detailed graphical display of processing parameters
Main functions of PLC control
Modem connection
Interlock system